Under CopyrightHeber, JörgJörgHeberRückerl, FlorianFlorianRückerlBerndt, DirkDirkBerndtSchmidt, JanJanSchmidtBellow, SebastienSebastienBellowTinevez, Jean-YvesJean-YvesTinevezKnobbe, JensJensKnobbeShorte, SpencerSpencerShorteWagner, MichaelMichaelWagner2022-03-135.10.20162016https://publica.fraunhofer.de/handle/publica/39317010.24406/publica-fhg-393170en621Spatio-angular illumination control using diffractive micromirror arraysconference paper