Stempfhuber, S.S.StempfhuberFelde, N.N.FeldeSchwinde, S.S.SchwindeTrost, M.M.TrostSchenk, P.P.SchenkSchröder, S.S.SchröderTünnermann, A.A.Tünnermann2022-03-062022-03-062020https://publica.fraunhofer.de/handle/publica/26335410.1364/OE.395638The potential of titanium and copper seed layers to enhance the optical properties of aluminum films for ultra-violet (UV) applications is analyzed. The seed layers significantly influence the initial layer growth of aluminum films. For the titanium-seeded aluminum, a surface roughness of 0.34 nm was observed. UV spectral reflectance measurements showed an average higher reflectivity of 4.8% for wavelengths from 120 nm to 200 nm for the aluminum film grown on the titanium seed layer. Furthermore, the titanium-seeded aluminum coatings were stable at an elevated temperature of 225°C and showed no increase in surface roughness or pinholes.enoptical coatingsmetal fluoridesLanthanum Trifluoridemetallic thin filmsaluminum coated steel620621journal article