Wolter, A.A.WolterSchenk, H.H.SchenkGaumont, E.E.GaumontLakner, H.H.Lakner2022-03-102022-03-102004https://publica.fraunhofer.de/handle/publica/34499910.1117/12.530795The micro scanning mirror with lateral out-of-plane comb drives is on its way to volume fabrication. This article reviews the development and highlights the most important activities and decisions that are representative for many MEMS devices that are supposed to go the same way. Careful analysis of the product requirements, design for reliability, design for testability, design for packaging, a mature process, and automated testing preferably on wafer-level have been identified as keys to volume fabrication of MEMS.enBarcode-Scanningmicro scanning mirroroptical MEMSMOEMSlaser beam deflectionbulk-micromachiningout-of-plane comb drive621conference paper