An invasive catheter flow sensor with on-chip CMOS read-out electronics for the online determination of blood flow

Liebscher, F.F.F.F.LiebscherSpiegel, E.E.SpiegelManoli, Y.Y.ManoliMokwa, W.W.MokwaKersjes, R.A.R.A.Kersjes2022-03-092022-03-091995https://publica.fraunhofer.de/handle/publica/324479A silicon flow sensor with integrated electronics for invasive blood flow measurement has been developed and investigated. The flow sensor is based on a silicon-on-insulator SIMOX substrate (Separation by Implated Oxygen) with a backside etched silicon membrane containing oxide trenches and uses a differential thermal measurement principle. The chosen fabrication process is fully CMOS-compatible. An on-chip switched capacitor circuitry converts the flow signal into a pulse width modulated signal. The device has been tested in a blood circulation simulator in the flow range of 0-10 l/min.enBlutdurchflußmessungCMOS-TechnikDurchflußsteuerungKardiographiemedizinische MeßtechnikMOS-Schaltung621An invasive catheter flow sensor with on-chip CMOS read-out electronics for the online determination of blood flowconference paper