Investigations of the ion acoustic affect during focussed ion beam irradiation

Teichert, J.J.TeichertBischoff, L.L.BischoffKöhler, B.B.Köhler2022-03-032022-03-031996https://publica.fraunhofer.de/handle/publica/18849810.1016/S0168-583X(96)00533-2en620658670539Investigations of the ion acoustic affect during focussed ion beam irradiationjournal article