Rabe, U.U.RabeArnold, W.W.Arnold2022-03-032022-03-031994https://publica.fraunhofer.de/handle/publica/18413610.1063/1.111869We have constructed an atomic force microscope enabling one to image the topography of a sample, and to monitor simultaneously ultrasonic surface vibrations in the MHz range. For detection of the distribution of the ultraonic vibration amplitude, a part of the position-sensing light beam reflected from the cantilever is directed to an external knife-edge detector. Acoustic images taken on the surface of a wafer show a lateral resolution of about 100 mm at an ultrasonic frequency of 20 MHz.enakustische MikroskopieKraftmikroskopieNahfeldmikroskopienear field microscopyRasterkraftmikroskopieRastersondenmikroskopiescanning force microscopy620658670621journal article