Kreutz, E.W.E.W.KreutzFrerichs, H.H.FrerichsMertin, M.M.MertinWesner, D.A.D.A.WesnerPfleging, W.W.Pfleging2022-03-032022-03-031995https://publica.fraunhofer.de/handle/publica/18716310.1016/0169-4332(94)00396-3The tailoring of chemical, morphological, and mechanical surface properties with laser radiation is described on the basis of the understanding and control of photon-matter interaction. The removal of matter by thermal and non-thermal processes including etching, the deposition of multilayer thin films, and the photoresistless patterning by direct and indirect processing techniques are illustrated by examples.encapacitorelectro-forminglithographymicrosystem technologymouldingphoton-matter interaction621669journal article