Recent advances in electron tomography: TEM and HAADF-STEM tomography for materials science and semiconductor applications

Kübel, C.C.KübelVoigt, A.A.VoigtSchoenmakers, R.R.SchoenmakersOtten, M.M.OttenSu, D.D.SuLee, T.-C.T.-C.LeeCarlsson, A.A.CarlssonBradley, J.J.Bradley2022-03-032022-03-032005https://publica.fraunhofer.de/handle/publica/20919410.1017/S1431927605050361en620660671502Recent advances in electron tomography: TEM and HAADF-STEM tomography for materials science and semiconductor applicationsjournal article