Fabrication of field emitter array using focused ion and electron beam induced reaction

Takai, M.M.TakaiKishimoto, T.T.KishimotoMorimoto, H.H.MorimotoPark, Y.K.Y.K.ParkLipp, S.S.LippLehrer, C.C.LehrerFrey, L.L.FreyRyssel, H.H.RysselHosono, A.A.HosonoKawabuchi, S.S.Kawabuchi2022-03-092022-03-091998https://publica.fraunhofer.de/handle/publica/33217010.1016/S0167-9317(98)00105-1en670620530Fabrication of field emitter array using focused ion and electron beam induced reactionconference paper