Seiffe, JohannesJohannesSeiffePillath, F.F.PillathTrogus, DanielDanielTrogusBrand, AndreasAndreasBrandSavio, ChristianChristianSavioHofmann, MarcMarcHofmannRentsch, JochenJochenRentsch2022-03-132022-03-132012https://publica.fraunhofer.de/handle/publica/39645610.1109/PVSC-Vol 2.2013.6656780In this study, the feasibility of creating one dielectric layer system acting simultaneously as antireflection coating, phosphorous doping source, masking against metal plating, and surface passivation is presented. Moreover, a similar layer stack is described, which behaves as rear-side surface passivation, boron dopant source, and internal reflection mirror. The optical characteristics of these layers are especially investigated and optimized for a solar cell's front- and rear-side coating. By consequent use of the multifunctional layers, a totally diffused solar cell with rear-side passivation and local rear contacts can be produced using only one wet chemical bath sequence, one multilayer vacuum step, and one high-temperature process. We present the first proof of concept for such a solar cell production using multifunctional plasma-enhanced chemical vapor deposition layers resulting already in a conversion efficiency of 18.3%.enconference paper