Monsalve Guaracao, Jorge MarioJorge MarioMonsalve GuaracaoKoch, Sandro G.Sandro G.KochJongmanns, MarcelMarcelJongmannsLanga, SergiuSergiuLangaMrosk, AndreasAndreasMroskStolz, MichaelMichaelStolz2025-11-272025-11-272025https://publica.fraunhofer.de/handle/publica/49988610.1109/IUS62464.2025.112017952-s2.0-105021810260The resolution capabilities of a time-of-flight sensing system based on a highly damped electrostatic ultrasound transducer (termed L-CMUT) and a commercial MEMS microphone are tested in this work. The combination of these two components results in a high-bandwidth frequency response function that enables the transmission of chirps in the range of 30-60 kHz. With this bandwidth, the cross-correlation between the transmitted and received signal results in a sharp peak and is capable of detecting echoes below the noise level. A resolution of 11 μm (in distance) and of 0.04° (in relative angle) were measured with this system. This opens possibilities for wideband time delay estimation in air, previously limited to the SONAR field.enfalseairborne ultrasoundcross-correlationMEMSTime-of-flight sensorconference paper