Hildenbrand, J.J.HildenbrandKorvink, J.J.KorvinkWöllenstein, J.J.WöllensteinPeter, C.C.PeterKürzinger, A.A.KürzingerNaumann, F.F.NaumannEbert, M.M.EbertLamprecht, F.F.Lamprecht2022-03-0420.10.20122010https://publica.fraunhofer.de/handle/publica/22124910.1109/JSEN.2009.203462410.24406/publica-r-2212492-s2.0-73849148253A micromachined thermal emitter for fast transient temperature operation with a novel hot-plate concept is presented. This concept is based on a nonaxis-symmetric design with excellent mechanical properties during temperature modulation combined with high thermal decoupling. Especially, the mechanical stress induced by the thermal expansion of the hot-plate and their suspension was improved. This results in a reduced sensitivity for buckling of the hot-plate. The thermal emitter is fabricated using silicon on insulator (SOI) technology and KOH-etching. Different suspension structures were realized and mechanical and thermal characterizations were performed. Besides the realization of the new hot-plate suspension design, a high thermal emission at wavelengths > 5 mum has been achieved using ceramic coatings for emissivity enhancement. This kind of emission tuning owns-in contrast to the typical surface and bulk structuring methods-the possibility to act simultaneously as a heater passivation.enMEMSfilterphotometerhigh temperatureinfraredmicrohotplatethermal emitterthermal radiationthermal source621620681journal article