Wagner, B.B.WagnerQuenzer, H.J.H.J.QuenzerHoerschelmann, S.S.HoerschelmannLisec, T.T.LisecJürss, M.M.Jürss2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/32599610.1109/MEMSYS.1996.494012en621Bistable microvalve with pneumatically coupled membranesconference paper