Herms, M.M.HermsIrmer, G.G.IrmerVerma, P.P.VermaGoerigk, G.G.Goerigk2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/35001810.1117/12.6020642-s2.0-25644441582Laser spectroscopical methods as Raman scattering (RS) and Photoluminescence as well as Small Angle Scattering of Xrays (SAXS) are presented as powerful tools for the efficient, nondestructive and contact-less characterization of nanoparticles of low concentration (< 1% in volume) in solids in dependence on the history of thermal treatment. The complementary determination of size distribution of CdSxSe1-x nanocrystallites in silicate glass filters and of arsenic precipitates in low-temperature grown GaAs layers by RS and SAXS is exemplarily presented.en620conference paper