Qu, W.W.QuMeyer, J.-U.J.-U.MeyerHaeusler, A.A.Haeusler2022-03-032022-03-031996https://publica.fraunhofer.de/handle/publica/188094The variation of the preparation parameters, such as the amount of LiCl-additive, firing profile and firing sequence, has a significant influence on the characteristics of the thick-film humidity sensor. The sensor characteristics are also affected by the working electrode materials. The paper describes the results of studies on the influences of different fabrication conditions on the resistance-humidity dependence of the thick-film humidity sensor.defiring-profilefiring-sequencehumidity sensorLiCl-additiveMnWO4 semiconductive metal oxideMnWO4 semiconductorpreparation parameterresistance-humidity dependencesensorthick-film humidity sensor610620681journal article