Input-Output Linearization of a MEMS Loudspeaker Using a Hammerstein Model

Belgradskaia, ElenaElenaBelgradskaiaFischer, GeorgGeorgFischerZhykhar, AlbertAlbertZhykharFritsch, TobiasTobiasFritsch2022-03-142024-03-182022-03-142020https://publica.fraunhofer.de/handle/publica/408818enacoustics transducersMEMS transducerMEMS-based speakermicro-electro-mechanical systems (MEMS)Sound Field Control621006Input-Output Linearization of a MEMS Loudspeaker Using a Hammerstein Modelconference paper