Bernhardsgrütter, Ralf E.Ralf E.BernhardsgrütterHepp, Christoph J.Christoph J.HeppSchmitt, KatrinKatrinSchmittJägle, MartinMartinJäglePernau, Hans-FridtjofHans-FridtjofPernauWöllenstein, JürgenJürgenWöllenstein2022-03-142022-03-142019https://publica.fraunhofer.de/handle/publica/40527710.1109/TRANSDUCERS.2019.8808543This paper presents a platinum thin film sensor able to investigate the thermal properties of a fluid whereas the sensing element is protected against corrosion by an intermediate stainless-steel wall. Progress claims include: 1) the 3-omega method is applied to investigate fluids which are not directly adjacent to the sensitive layer, 2) the 3-omega-method is applied for a meander structure, 3) a theoretical model is developed and agrees well with the experiment. These findings can have a key role for future stand-alone sensors measuring thermal parameters, or for sensors which combine several measurement principles, e.g. the 3-omega method for thermal parameter detection and the thermal flow meters for flow speed measurements.en3-Omega MethodThermal Sensorthermal propertyPlatinum Thin Film Sensormultilayer structure621conference paper