Azhdast, M.H.M.H.AzhdastAzdasht, G.G.AzdashtLüdeke, H.H.LüdekeLang, K.-D.K.-D.LangGlaw, V.V.Glaw2022-03-132022-03-132015https://publica.fraunhofer.de/handle/publica/39493210.1364/ASSL.2015.AM5A.3This research relates to methods of deposition and patterning a surface with nano sputtered particles by Laser. The method is mask-less and without vacuum requirement which can be used in wire bonding and microelectronics devices.enNano particle production by laser ablation and metal sputtering on Si-wafer substrateconference paper