Jegert, G.G.JegertKersch, A.A.KerschWeinreich, W.W.WeinreichSchröder, U.U.SchröderLugli, P.P.Lugli2022-03-042022-03-042010https://publica.fraunhofer.de/handle/publica/22313810.1063/1.3310065We report on a simulation algorithm, based on kinetic Monte Carlo techniques, that allows us to investigate transport through high-permittivity dielectrics. In the example of TiN/ZrO2/TiN capacitor structures, using best-estimate physical parameters, we have identified the dominant transport mechanisms. Comparison with experimental data reveals the transport to be dominated by Poole-Frenkel emission from donorlike trap states at low fields and trap-assisted tunneling at high fields.en620621journal article