PACVD-derived thin films in the system Si-B-C-N

Hegemann, DirkDirkHegemannRiedel, R.R.RiedelOehr, ChristianChristianOehr2022-03-032022-03-031999https://publica.fraunhofer.de/handle/publica/19484110.1002/(SICI)1521-3862(199903)5:2<61::AID-CVDE61>3.0.CO;2-Zen610620660548PACVD-derived thin films in the system Si-B-C-Njournal article