Zinin, P.P.ZininBerezina, S.S.BerezinaFei, D.D.FeiRebinsky, D.D.RebinskyLemor, R.R.LemorWeiss, E.E.WeissArnoud, C.C.ArnoudArnold, W.W.ArnoldKöhler, B.B.Köhler2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/34244210.1109/ULTSYM.2003.12935402-s2.0-4143055992A high frequency scanning acoustic microscopy (SAM) operating at 1-1.3 GHz was used to investigate subsurface defects in diamond-like carbon (DLC) films that were 2-3 µm thick. Because the wavelength of the longitudinal wave in the film was comparable to the film thickness, the acoustical images obtained were near-field images. to inerpret the features in the acoustical images, a multidisciplinary approach was utilized through the combination of SAM with atomic force microscopy (AFM), focused ion beam (FIB) technique, surface Brillouin spectroscopy (SBS), and optical microscopy.enacoustic microscopy620658670conference paper