Monitoring system for airborne molecular contamination (AMC) in semiconductor manufacturing areas and micro-environments

Otto, M.M.OttoLeibold, A.A.LeiboldWulf, L.L.WulfHurlebaus, M.M.HurlebausPfitzner, L.L.Pfitzner2022-03-112022-03-112009https://publica.fraunhofer.de/handle/publica/36204010.4028/www.scientific.net/SSP.145-146.1352-s2.0-75849130008en670669Monitoring system for airborne molecular contamination (AMC) in semiconductor manufacturing areas and micro-environmentsconference paper