Dischler, B.B.DischlerKoidl, P.P.Koidl2022-03-082022-03-081988https://publica.fraunhofer.de/handle/publica/315239A scanning CO2 laser interferometer is described, in which the test sample itself forms the interference cavity. Results for plane parallel plates of germanium and of galliumarsenide are presented and discussed. Samples with perfectly plane surfaces allow to evaluate the uniformity of the refractive index across the sample.engermaniumHomogenitätInfrarotinterferometerlaser621667conference paper