Oehr, ChristianChristianOehrVohrer, UweUweVohrer2022-03-032022-03-031995https://publica.fraunhofer.de/handle/publica/186868The present article provides a survey of the use of low-pressure plasma plants for cleaning and the pretreatment of solvent and aqueous-alkaline processes, where even anorganic pollutions may be partly eliminated as well. Frequently, however, a wet chemical cleaning is still indispensable.delow pressure plasma cleaningNiederdruck-Plasmabehandlung610620660669Plasmafeinreinigen. PerspektivenPlasma fine cleaning. Possibilities and limitsjournal article