A silicon vibration sensor for tool state monitoring working in the acceleration range

Thomas, J.J.ThomasKühnhold, R.R.KühnholdSchnupp, R.R.SchnuppRyssel, H.H.Ryssel2022-03-092022-03-091999https://publica.fraunhofer.de/handle/publica/333675en670620530A silicon vibration sensor for tool state monitoring working in the acceleration rangeconference paper