In situ ATR monitoring of cross-link and diffusion behavior of thin-film epoxy and sol-gel based imprint resists

Under CopyrightVerschuuren, MarcMarcVerschuurenFader, RobertRobertFaderBrakel, Remco vanRemco vanBrakelHurxkens, Gert-JanGert-JanHurxkens2022-03-124.12.20132013https://publica.fraunhofer.de/handle/publica/38147410.24406/publica-fhg-381474en670620530In situ ATR monitoring of cross-link and diffusion behavior of thin-film epoxy and sol-gel based imprint resistsposter