Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS

Gastinger, K.K.GastingerHaugholt, K.H.K.H.HaugholtRøyset, A.A.RøysetAlbero, J.J.AlberoZeitner, U.U.ZeitnerGorecki, C.C.Gorecki2022-03-112022-03-112009https://publica.fraunhofer.de/handle/publica/36599310.1007/978-3-642-03051-2-104enDesign of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMSconference paper