Maozie, G.G.MaozieNieradka, K.K.NieradkaKopiec, D.D.KopiecRitz, Y.Y.RitzZschech, E.E.ZschechGotszalk, T.T.Gotszalk2022-03-042022-03-042012https://publica.fraunhofer.de/handle/publica/2310312-s2.0-84870976903In this paper we describe a system for measuring the resonance characteristics of the silicon cantilever. The method of preparation spring cantilevers is presented. The construction of a specialized optical system to detect the deflection of the cantilevers and the principle of detection the cantilevers deflection is described. The new method based on the modulated laser beam, to measure characteristics of the high frequency transducers, is presented.en620621journal article