Knopf, H.H.KnopfLundt, N.N.LundtBucher, T.T.BucherHöfling, S.S.HöflingTongay, S.S.TongayTaniguchi, T.T.TaniguchiWatanabe, K.K.WatanabeStaude, I.I.StaudeSchulz, U.U.SchulzSchneider, C.C.SchneiderEilenberger, F.F.Eilenberger2022-03-052022-03-052019https://publica.fraunhofer.de/handle/publica/25814010.1364/OME.9.0005982-s2.0-85060377152We demonstrate a new approach to integrate single layer MoSe2 and WSe2 flakes into monolithic all-dielectric planar high-quality micro-cavities. These distributed-Bragg-reflector (DBR) cavities may, e.g., be tuned to match the exciton resonance of the 2D-materials. They are highly robust and compatible with cryogenic and room-temperature operation. The integration is achieved by a customized ion-assisted physical vapor deposition technique, which does not degrade the optical properties of the 2D-materials. The monolithic 2D-resonator is shown to have a high Q-factor in excess of 4500. We use photoluminescence (PL) experiments to demonstrate that the coating procedure with a SiO2 coating on a prepared surface does not significantly alter the electrooptical properties of the 2D-materials. Moreover, we observe a resonance induced modification of the PL-spectrum for the DBR embedded flake. Our system thus represents a versatile platform to resonantly enhance and tailor light-matter-interaction in 2D-materials. The gentle processing conditions would also allow the integration of other sensitive materials into these highly resonant structures.en620535journal article