Low oxygen content trimethylaluminium and trimethylindium for MOVPE of light emitting devices

Smith, L.M.L.M.SmithRushworth, S.A.S.A.RushworthRavetz, M.S.M.S.RavetzOdedra, R.R.OdedraKonjolia, R.R.KonjoliaAgert, CarstenCarstenAgertDimroth, FrankFrankDimrothSchubert, U.U.SchubertBett, Andreas W.Andreas W.Bett2022-03-032022-03-032000https://publica.fraunhofer.de/handle/publica/19864810.1016/S0022-0248(00)00654-0enEpitaxieEpitaxie MOVPE621697548Low oxygen content trimethylaluminium and trimethylindium for MOVPE of light emitting devicesjournal article