Laser-assisted surface microstructuring of ME/ZrO2 bilayered thin-film system

Starbova, K.K.StarbovaKrumov, E.E.KrumovRadoeva, M.M.RadoevaStarbov, N.N.StarbovPopov, D.D.PopovSchlaghecken, G.G.SchlagheckenKreutz, E.W.E.W.Kreutz2022-03-032022-03-032003https://publica.fraunhofer.de/handle/publica/20339910.1016/S0169-4332(03)00526-9en621669Laser-assisted surface microstructuring of ME/ZrO2 bilayered thin-film systemjournal article