In situ layer characterization by spectroscopic ellipsometry at high temperatures

Lehnert, W.W.LehnertPetrik, P.P.PetrikSchneider, C.C.SchneiderPfitzner, L.L.PfitznerRyssel, H.H.Ryssel2022-03-092022-03-091998https://publica.fraunhofer.de/handle/publica/330595en670620530In situ layer characterization by spectroscopic ellipsometry at high temperaturesconference paper