Jadghold, U.A.U.A.JadgholdBuchmann, L.-M.L.-M.BuchmannPilz, W.W.PilzTorkler, M.M.Torkler2022-03-082022-03-081992https://publica.fraunhofer.de/handle/publica/320067en621Novel surface imaging process with ion-beam lithography and dry developmentconference paper