Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)

Under CopyrightFörthner, MichaelMichaelFörthnerFader, RobertRobertFaderRumler, MaximilianMaximilianRumlerRommel, MathiasMathiasRommelFrey, LotharLotharFreyGirschikofsky, M.M.GirschikofskyBelle, S.S.BelleHellmann, R.R.HellmannKlein, Jan JasperJan JasperKlein2022-03-129.4.20152015https://publica.fraunhofer.de/handle/publica/38820910.24406/publica-fhg-388209ennanoimprintUV-SCILhybrid polymersBragg grating sensors670620530Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)poster