Bohmayr, W.W.BohmayrBurenkov, A.A.BurenkovLorenz, J.J.LorenzRyssel, H.H.RysselSelberherr, S.S.Selberherr2022-03-032022-03-031995https://publica.fraunhofer.de/handle/publica/18720610.1109/66.475181en670620530621Trajectory split method for Monte-Carlo simulation of ion implantationjournal article