Riedel, R.R.RiedelToma, L.L.TomaJanssen, E.E.JanssenNuffer, J.J.NufferMelz, T.T.MelzHanselka, HolgerHolgerHanselka2022-03-042022-03-042010https://publica.fraunhofer.de/handle/publica/22159010.1111/j.1551-2916.2009.03496.xPiezoresistivity was found in silicon oxycarbide (SiOC) ceramics synthesized using a polymer-to-ceramic transformation process. A commercial polysiloxane, namely poly(methylsilsesquioxane), was used as the starting material. The SiOC ceramic synthesized at 1400 degrees C exhibits high piezoresistivity, leading to strain sensitivities (k factors) of similar to 145, while lower pyrolysis temperatures (1000 degrees-1300 degrees C) do not show a piezoresistive effect. Structural characterization by X-ray diffraction in combination with micro-Raman spectroscopy revealed that with increasing pyrolysis temperature, the content of free carbon in the X-ray amorphous SiOC matrix increases without changes in the overall composition. Percolation effects related to the carbon-based phase segregated from the SiOC matrix are responsible for the piezoresistivity analyzed in the SiOC ceramic.ensensorceramic620666journal article