Monsalve Guaracao, J.M.J.M.Monsalve GuaracaoKircher, M.M.KircherWall, F.F.WallKrenkel, M.M.KrenkelKaiser, B.B.KaiserLanga, S.S.LangaSchenk, H.H.Schenk2022-03-152022-03-152020https://publica.fraunhofer.de/handle/publica/41217810.1109/IUS46767.2020.9251316The design, fabrication, and acoustic characterization of an electrostatic ultrasound transducer based on lateral actuation is documented in this letter. Unlike cMUTs or pMUTs, this device-NED-MUT -does not use a membrane to generate pressure waves but instead displaces air using the volume of the chip. A single transmitter unit, composed of 258 actuators in an area of 3×3 mm 2 operating at 40 kHz, was capable of generating a pressure level of 87 dB (relative to 20 mPa rms) at a distance of 8.9 cm with an input voltage of 24V DC plus 24V AC. The measured performance makes the NED-MUT suitable for gesture recognition using ultrasound ranging.en621First time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognitionconference paper