Tantalum and tungsten in silicon carbide: Identification and polytype dependence of deep levels

Grillenberger, J.J.GrillenbergerAchtziger, N.N.AchtzigerPasold, G.G.PasoldSielemann, R.R.SielemannWitthuhn, W.W.Witthuhn2022-03-092022-03-092001https://publica.fraunhofer.de/handle/publica/337240en006621Tantalum and tungsten in silicon carbide: Identification and polytype dependence of deep levelsconference paper