Roth, N.N.RothDomnick, J.J.DomnickWeigand, B.B.WeigandFrohn, A.A.Frohn2022-03-092022-03-092001https://publica.fraunhofer.de/handle/publica/338312In the present paper it will be shown that morphology dependant resonances may influence the accuracy of three different measurement techniques.enMorphologieoptical measurement670Influence of Morphology Dependant Resonances on Optical Measurement Techniquesconference paper