Mokwa, W.W.Mokwa2022-03-082022-03-081991https://publica.fraunhofer.de/handle/publica/318378Silicon technologies not only allows the fabrication of integrated analog and digital circuitry but also the fabrication of micro sensors for detection of physical and chemical parameters. In this paper different micro sensors will be presented and examples for their use in microsystems for medical applications will be given.enBlutanalyseHerzkatheterinvasives MonitoringMedizintechnikMikrosensorenMikrosystemtechnik621conference paper