Löchel, B.B.LöchelMaciossek, A.A.MaciossekWagner, B.B.WagnerQuenzer, H.J.H.J.Quenzer2022-03-032022-03-031996https://publica.fraunhofer.de/handle/publica/18928110.1149/1.1836415en621541UV-depth lithography and galvanoforming for micro machiningjournal article