Bakke, T.T.BakkeVölker, B.B.VölkerFriedrichs, M.M.FriedrichsRudloff, D.D.RudloffSchenk, H.H.SchenkLakner, H.H.Lakner2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/35132610.1117/12.6461822-s2.0-33646166805enoptical MEMSspatial light modulatormicromirrorwafer bondingmaskless lithography621Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bondingconference paper