Heidrich, N.N.HeidrichIankov, D.D.IankovHees, J.J.HeesPletschen, WilfriedWilfriedPletschenSah, R.E.R.E.SahKirste, LutzLutzKirsteZuerbig, V.V.ZuerbigNebel, C.C.NebelAmbacher, OliverOliverAmbacherLebedev, VadimVadimLebedev2022-03-042022-03-042013https://publica.fraunhofer.de/handle/publica/23396410.1088/0960-1317/23/12/125017Micro electromechanical systems are a matter of intense research pursuing to replace silicon and III-V semiconductor-based components in prospective radio frequency communication devices. Due to their unique material properties, microstructures combining doped nano-crystalline diamond (NCD) and AlN thin films are promising for piezo-actuated microsystems in order to increase operating frequencies. In this work, single and doubly clamped unimorph NCD-on-AlN micro-resonators were fabricated and then characterized by laser vibrometry towards their flexural resonant frequencies in the range of 0.1-20 MHz to deduce their mechanical properties. Enhancements in the structural properties of an AlN piezo-actuator united with an advanced elasticity of nano-diamond electrode lead to superior mechanical parameters of the resulting unimorphs. These allow for the fabrication of flexural resonant microsystems with a potential to extend the operating frequencies well above 1 GHz.en621journal article