Gillner, ArnoldArnoldGillner2024-03-012024-03-012024https://publica.fraunhofer.de/handle/publica/46271110.1007/978-3-030-98323-9_36Laser fine cutting today is used for numerous applications in fine mechanics, medical industry, and electronics. The main fields of use can be found in thin materials with thicknesses <0.5 mm and generally complex structures with feature sizes <200 µm.enbook article