Bark, C.C.BarkVögele, G.G.VögeleWeisener, T.T.Weisener2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/325894The Fraunhofer-Institut Produktionstechnik und Automatisierung is presently developing a number of different grippers for the handling of MEMS and small parts. One of the new and very promising tools is the adhesive gripper. The gripping-system can be integrated as a standard tool in handling systems such as for microelectronical devices or for precision engineering products. The gripper's main features are high flexibility regarding shape, size and material of the units handled. Furthermore adhesive gripping provides a centring effect as well as a compliance effect. The adhesive used for gripping is a fluid that evaporates without leaving any particles on the unit's surface and that does not influence the function of the units. The surface tension of the fluid attracts the unit to the gripper and builds up forces that can hold micromechanical parts very safely without damaging the breakable surface structures of these parts. The cycle times of adhesive grippers are comparable to pneum atic gripping. Experimental evaluations show a high reliability of the process with very high precision, indicating a new tool for the challenge of microassembly for use by industry.enAdhäsionFernbedienungFluidikgripperMEMSmicroassemblymicroengineeringMikroelektronikMikromontageMikrotechnik670conference paper