Holz, T.T.HolzDietsch, R.R.DietschMai, H.H.MaiMeyer, C.F.C.F.MeyerScholz, R.R.Scholz2022-03-032022-03-031998https://publica.fraunhofer.de/handle/publica/192239A graded Ni/C-multilayer was characterized at PTB labs at BESSY (SX 700). Reflectivities of up to 23.4 per cent for E=277eV were measured. The HREM (High Resolution Electron Microscopy) micrograph and the results of measurements of soft and hard X-ray reflectivity show the reproducibility of the deposited layer thicknesses in the layer stack. Simulations of hard and soft X-ray reflectivity confirm the prediction of interface roughnesses of 0.4nm and layer thickness deviations of 0.1nm.enLaserablationmonochromatormultilayerMultischichtsystemNi/CPLDRöntgenspiegelX-ray mirror667621671book article