Fichtner, J.J.FichtnerHagenkamp, M.M.HagenkampNoss, M.M.NossGünther, S.S.Günther2022-03-142022-03-142017https://publica.fraunhofer.de/handle/publica/4043702-s2.0-85055352503en620667670Electron beam curable varnishes - Rapid processing of planarization layersconference paper