Frömel, J.J.FrömelLin, Y.Y.LinMori, M.M.MoriTanaka, S.S.TanakaGeßner, ThomasThomasGeßnerEsashi, M.M.Esashi2022-03-112022-03-112010https://publica.fraunhofer.de/handle/publica/370278enNEMS/MEMS and passive components integration by using novel LTCC substrateconference paper