Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays

Under CopyrightScharin, MarinaMarinaScharinNewcomer, KateKateNewcomerDirnecker, TobiasTobiasDirneckerAl-Naimi, A.A.Al-NaimiRumler, MaximilianMaximilianRumlerRommel, MathiasMathiasRommelFrey, LotharLotharFrey2022-03-124.11.20152015https://publica.fraunhofer.de/handle/publica/38936010.24406/publica-fhg-389360enPDMSmetal electrodesputteringpatterning670620530Thin film metallization of PDMS with improved adhesion properties for micro electrode arraysposter