Optical, structural and mechanical properties of lanthanide trifluoride thin film materials for use in the DUV-spectral region

Thielsch, R.R.ThielschHeber, J.J.HeberJakobs, S.S.JakobsKaiser, N.N.KaiserDuparre, A.A.DuparreUllmann, J.J.Ullmann2022-03-092022-03-091998https://publica.fraunhofer.de/handle/publica/330985Optical, structural and mechanical properties of evapored films of NdF3, LaF3, GdF3 and of different dielectric multilayer coatings for DUV-eximer laser applications have been studied.encoatingdeep ultra violetfluoridesoptical property620Optical, structural and mechanical properties of lanthanide trifluoride thin film materials for use in the DUV-spectral regionconference paper